TY  - BOOK
AU  - Sze,S.M.
TI  - VLSI technology
SN  - 0070627355 
AV  - TK7874 .V566 1988
U1  - 621.381/73 19
PY  - 1988///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Very large scale integration
N1  - Includes bibliographies and index
ER  -