TY  - BOOK
AU  - Frey,Hartmut
AU  - Khan,Hamid R..
TI  - Handbook of thin film technology
T2  - McGraw-Hill handbooks
AV  - TK7871.15.F5 H34
U1  - 621.3817/3 
PY  - 2015///
CY  - New York
PB  - McGraw-Hill
KW  - Thin film devices
N1  - Includes bibliographical references and index
ER  -