TY  - BOOK
AU  - Ghandhi,Sorab K.
TI  - VLSI fabrication principles: silicon and gallium arsenide 
SN  - 9814126942
AV  - TK7874 .G473 1994
U1  - 621.3815/2 20
PY  - 1994///
CY  - New York
PB  - Wiley
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Silicon
KW  - Gallium arsenide
N1  - Includes bibliographical references and index
ER  -